仕 様 |
Laser Unit |
Laser Unit Model# |
Spectra Physics V-xtreme |
|
|
Laser Type |
YVO4 |
|
|
Laser Wavelength |
1064nm |
|
|
Laser Power |
8 Watt (Max) |
|
|
Laser Power Stability |
4%rms @400KHz |
|
Bump Specification |
Bump Diameter |
4-20μm |
|
|
Bump Height |
5.5 to 30nm |
|
|
Bump Pitch
|
15 to 100 μm |
|
|
Bump Radius |
13.0mm and other |
|
|
Bump Roundness
|
0.3μm or better |
|
|
Bump Height Stability |
σ≦5Å |
|
Bump Layout |
Normal Mode
|
Spiral layout bump |
|
|
Glide Calibration Bump Mode
|
One circle bump at a specific radius |
|
|
Tilt Bump Mode |
Spiral layout bump with gradual height change |
|
Spindle Unit |
Spindle
|
Air bearing spindle |
|
|
Disk Clamp
|
Mechanical (clamp on/off by Air Pressure) |
|
|
Spindle Rotation Speed
|
100-5000rpm (FS 1% or less) |
|
|
Vertical Run Out
|
5μm or less (@Disk contact surface) |
|
|
Axial Run Out |
3μm or less |
|
Automation |
Cleanliness |
Class 100 at 0.1μm particle size |
|
|
Throughput |
420PPH or more (Depend on Bump Layout) |
|
|
Conveyor Buffer |
5cst at incoming side and 2cst at outgoing side
This can be changed bosed upon request |
|
Utility |
Power Supply |
100V 1phase 20Amp
200V 3phase 15Amp |
|
|
Clean Dry Air |
Pressure： 0.6+/-0.05MPa
Flow Rate： 60Nl/min or more
Tube Diameter： 10mm in diameter |
